Plasma Etching Recipes History
Review DOE runs and view the anomalies identified
Recipe Test Results55 recipes
| Recipe ID | Date / Time | Dep time (s) | Etch Time (s) | Dep Pressure | Etch Pressure | Dep Bias (W) | Etch Bias (W) | Dep Source Power (W) | Etch Source Power (W) | C4F8 (sccm) | SF6 (sccm) | CD Bias (um) | Status | Action |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
RCP001 | 2025-09-27 09:00 | 5 | 8 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -11 | Anomaly | |
RCP002 | 2025-09-27 10:30 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 276 | 1000 | -11 | Anomaly | |
RCP003 | 2025-09-27 13:15 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 190 | 840 | -1.4 | Good | |
RCP004 | 2025-09-27 15:45 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -0.8 | Good | |
RCP005 | 2025-09-28 08:30 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -2.8 | Good | |
RCP006 | 2025-09-28 10:15 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -8.3 | Anomaly | |
RCP007 | 2025-09-28 12:00 | 5 | 8 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -1.7 | Good | |
RCP008 | 2025-09-28 14:30 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -0.9 | Good | |
RCP009 | 2025-09-29 08:45 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -4.4 | Good | |
RCP010 | 2025-09-29 10:30 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -3 | Good | |
RCP011 | 2025-09-29 13:00 | 5 | 8 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -7 | Anomaly | |
RCP012 | 2025-09-29 15:15 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -8.3 | Anomaly | |
RCP013 | 2025-09-30 09:00 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 276 | 1000 | -0.9 | Good | |
RCP014 | 2025-09-30 11:00 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 190 | 840 | -2.1 | Good | |
RCP015 | 2025-09-30 13:30 | 5 | 8 | 21 | 64 | 0 | 250 | 4000 | 6000 | 276 | 1000 | -0.6 | Good | |
RCP016 | 2025-09-30 15:45 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -0.3 | Good | |
RCP017 | 2025-10-01 08:30 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -2.6 | Good | |
RCP018 | 2025-10-01 10:15 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | 1.2 | Good | |
RCP019 | 2025-10-01 12:00 | 5 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | 1.1 | Good | |
RCP020 | 2025-10-01 14:30 | 3 | 8 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | 0 | Good | |
RCP021 | 2025-10-02 08:45 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 276 | 1000 | -4.7 | Good | |
RCP022 | 2025-10-02 10:30 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -0.5 | Good | |
RCP023 | 2025-10-02 13:00 | 3 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 276 | 1000 | -3.2 | Good | |
RCP024 | 2025-10-02 15:15 | 5 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -1 | Good | |
RCP025 | 2025-10-03 09:00 | 3 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -1 | Good | |
RCP026 | 2025-10-03 11:00 | 3 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 276 | 1000 | -1 | Good | |
RCP027 | 2025-10-03 13:30 | 4 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 190 | 840 | 0.2 | Good | |
RCP028 | 2025-10-03 15:45 | 1 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -11.4 | Anomaly | |
RCP029 | 2025-10-04 08:30 | 2 | 8 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -3.2 | Good | |
RCP030 | 2025-10-04 10:15 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | 2.86 | Good | |
RCP031 | 2025-10-04 12:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | 1.93 | Good | |
RCP032 | 2025-10-04 14:30 | 1 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -4.3 | Good | |
RCP033 | 2025-10-04 16:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | 0.32 | Good | |
RCP034 | 2025-10-05 08:45 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -2 | Good | |
RCP035 | 2025-10-05 10:30 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -1.3 | Good | |
RCP036 | 2025-10-05 12:15 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -0.7 | Good | |
RCP037 | 2025-10-05 14:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -2.1 | Good | |
RCP038 | 2025-10-05 15:45 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -3.1 | Good | |
RCP039 | 2025-10-06 08:30 | 2 | 8 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | 1.1 | Good | |
RCP040 | 2025-10-06 09:45 | 3 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | 0 | Good | |
RCP041 | 2025-10-06 11:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -1 | Good | |
RCP042 | 2025-10-06 12:15 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -1 | Good | |
RCP043 | 2025-10-06 13:30 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -1 | Good | |
RCP044 | 2025-10-06 14:45 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -1 | Good | |
RCP045 | 2025-10-06 16:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -1 | Good | |
RCP046 | 2025-09-27 11:30 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -4.7 | Good | |
RCP047 | 2025-09-28 16:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | 0.5 | Good | |
RCP048 | 2025-09-29 16:30 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | 1.2 | Good | |
RCP049 | 2025-09-30 17:00 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -0.8 | Good | |
RCP050 | 2025-10-01 16:15 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -0.8 | Good | |
RCP051 | 2025-10-02 16:45 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -0.3 | Good | |
RCP052 | 2025-10-03 17:00 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -2.4 | Good | |
RCP053 | 2025-10-04 17:15 | 2 | 4 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | 1.5 | Good | |
RCP054 | 2025-10-05 17:00 | 2 | 4 | 21 | 64 | 0 | 250 | 4000 | 6000 | 190 | 840 | -1 | Good | |
RCP055 | 2025-10-06 17:15 | 2 | 8 | 21 | 64 | 0 | 250 | 5000 | 6000 | 276 | 1000 | -0.2 | Good |
Next Step: Select 'Run RCA' to begin comparing this recipe with a good baseline for root cause analysis.